A novel polygon-based circuit extraction algorithm for full custom designed MEMS sensors

2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) Pub Date : 2016-06-27 DOI:10.1109/SMACD.2016.7520719

Axel Hald, Johannes Seelhorst, M. Reimann, J. Scheible, J. Lienig

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引用次数: 3

Abstract

In contrast to IC design, MEMS design still lacks sophisticated component libraries. Therefore, the physical design of MEMS sensors is mostly done by simply drawing polygons. Hence, the sensor structure is only given as plain graphic data which hinders the identification and investigation of topology elements such as spring, anchor, mass and electrodes. In order to solve this problem, we present a rule-based recognition algorithm which identifies the architecture and the topology elements of a MEMS sensor. In addition to graphic data, the algorithm makes use of only a few marking layers, as well as net and technology information. Our approach enables RC-extraction with commercial field solvers and a subsequent synthesis of the sensor circuit. The mapping of the extracted RC-values to the topology elements of the sensor enables a detailed analysis and optimization of actual MEMS sensors.

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一种基于多边形的全定制MEMS传感器电路提取算法

与IC设计相比，MEMS设计仍然缺乏复杂的元件库。因此，MEMS传感器的物理设计大多是通过简单地绘制多边形来完成的。因此，传感器结构仅以简单的图形数据给出，阻碍了对弹簧、锚、质量和电极等拓扑元素的识别和研究。为了解决这一问题，我们提出了一种基于规则的识别算法来识别MEMS传感器的结构和拓扑元素。除了图形数据外，该算法只利用了少量的标记层，以及网络和技术信息。我们的方法可以使用商业现场求解器进行rc提取，并随后合成传感器电路。将提取的rc值映射到传感器的拓扑元素，可以对实际的MEMS传感器进行详细的分析和优化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)

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