Chlorine and Sulfur Effects on Gold-Aluminum Wire Bond Reliability

L. Liao, Xi Zhang, Younan Hua, Li Xiaomin
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引用次数: 1

Abstract

Currently, wire bonding is still the dominant interconnection mode in microelectronic packaging, and epoxy molding compound (EMC) is the major encapsulant material. Normally EMC contains chlorine (Cl) and sulfur (S) ions. It is important to understand the control limit of Cl and S in the EMC to ensure good Au wire bond reliability. This paper discussed the influences of Cl and S on the Au wire bond. Different contents of Cl and S were purposely added into the EMC. Accelerated reliability tests were performed to understand the effects of Cl, S and their contents on the Au wire bond reliability. Failure analysis has been conducted to study the failure mechanism. It is found that Cl reacted with IMCs under humid environment. Cl also caused wire bond failure in HTS test without moisture. On the other hand, the results showed that S was not a corrosive ion. It was also not a catalyst to the Au bond corrosion. Whilst, high content of S remain on the bond pad hindered the IMCs formation and caused earlier failure of the wire bond.
氯和硫对金-铝线键合可靠性的影响
目前微电子封装中,线键合仍是主要的互连方式,环氧模塑复合材料(EMC)是主要的封装材料。EMC通常含有氯离子(Cl)和硫离子(S)。了解电磁兼容中Cl和S的控制极限是保证良好的金线键合可靠性的重要因素。本文讨论了Cl和S对金丝键合的影响。在EMC中有意添加不同含量的Cl和S。通过加速可靠性试验了解了Cl、S及其含量对金丝键合可靠性的影响。进行了失效分析,研究了失效机理。发现Cl在潮湿环境下与IMCs发生反应。在无水分的HTS试验中,Cl也会导致钢丝粘结失效。另一方面,结果表明S不是腐蚀性离子。它也不是金键腐蚀的催化剂。同时,焊盘上残留的高含量S阻碍了imc的形成,导致焊盘早期失效。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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