Effective Electrostatic Discharge detection in equipment via EMI

Abstract

Electrostatic Discharge (ESD) is a common quality issue in the semiconductor industry. ESD can be caused by improper human handling, poor equipment grounding, triboelectric charging, frictional movement, use of insulator material and many others. It is important to have the right method to detect the ESD event effectively. This paper will illustrate an actual case study on how Electromagnetic Interference (EMI) measurement techniques can be used to effectively detect the high speed ESD events versus the conventional ESD standard practices.