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Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879670
Xingtao Wu, R. A. Brown, S. Mathews, K. Farmer
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引用次数: 15
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2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)
2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)
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