Improvements in index alignment method for laser-fiber array packaging

M.S. Cohen, M. DeFranza, F. J. Canora, M. Cina, R. A. Rand, P. Hoh
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引用次数: 20

Abstract

An "index alignment" method, based on the registration of fiducial marks, was previously developed for passive alignment of a laser array to a corresponding fiber array. This method has recently been improved and used to fabricate laser-fiber array transmitter modules for single-mode operation at 1300 nm. An improved computer-controlled alignment-stage system with machine-vision features has been installed in order to render the alignment procedure faster, more precise, and more reliable; this system was particularly effective in quick achievement of the difficult but necessary angular alignment of the components. Special "self-registration" component-fabrication techniques were also developed to avoid mask-registration errors associated with the fabrication of the laser chip and the fiber carrier, so that the fiducial marks were automatically keyed to the positions of the laser ridges and V grooves, respectively. Measures were also taken to improve the accuracy of alignment of the etch mask to the silicon crystallographic axes during fiber-carrier fabrication, and to improve the etch-stop indication process. These techniques permitted an estimated accuracy and wafer-scale uniformity of /spl sim//spl plusmn/0.5 /spl mu/m of the fiber-carrier V-groove widths. In addition, the essential elements of of a practical technique for separation of a large-array laser-fiber module into a multiplicity of small-array submodules was demonstrated; in this way the cost of the alignment procedure could be amortized over a large number of transmitter modules. Several connectorized laser-fiber array modules were fabricated with the improved alignment apparatus and components. Test results showed that for single-mode operation at 1300 nm, coupling efficiencies greater than 8% could be achieved for a laser-fiber spacing of about 35 /spl mu/m. Such values closely approach the 9% coupling efficiency observed at this spacing with active alignment. Tests of the completed module at 1 Gb/s showed values of RIN low enough to permit operation at distances of about 1 km.<>
激光光纤阵列封装折射率对准方法的改进
一种基于基准标记配准的“索引对准”方法,已被开发用于激光阵列与相应光纤阵列的被动对准。该方法最近得到了改进,并用于制造1300 nm单模工作的激光光纤阵列发射模块。安装了具有机器视觉功能的改进的计算机控制的对准台系统,以使对准过程更快,更精确,更可靠;该系统在快速实现组件的困难但必要的角度对准方面特别有效。为了避免与激光芯片和光纤载体制造相关的掩模配准误差,还开发了特殊的“自配准”组件制造技术,从而使基准标记分别自动键合到激光脊和V型凹槽的位置上。为了提高刻蚀掩模在光纤载流子制造过程中与硅晶体轴的对准精度,改进刻蚀停止指示工艺,提出了相应的改进措施。这些技术可使光纤载波v型槽宽度的精度和晶圆尺度均匀性达到/spl sim//spl plusmn/0.5 /spl mu/m。此外,还演示了将大阵列激光光纤模块分离成多个小阵列子模块的实用技术的基本要素;这样,对准过程的成本可以平摊到大量的发射机模块上。利用改进的对准装置和器件,制备了多个连接的激光光纤阵列模块。测试结果表明,在1300 nm单模工作下,激光-光纤间距约为35 /spl mu/m时,耦合效率大于8%。这些值非常接近主动对准时在该间距观察到的9%耦合效率。对完成的模块以1gb /s的速度进行的测试显示,RIN值足够低,可以在大约1km的距离上运行
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