Spectral measurement with a UV linear-variable optical filter microspectrometer

Abstract

This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm – 400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization of the LVOF, by passing monochromatic light through the LVOF, shows high linearity of the profile. The filter provides the possibility to have a robust high-resolution microspectrometer in the UV on a CMOS chip. Spectrum of a Mercury lamp has been measured using the UV LVOF-microspectrometer with 0.5 nm spectral resolution.