Characteristics of electric devices made by direct nanoparticle spraying

E. Ozawa, Y. Kawakami, Toshinobu Yoshida, M. Iwashina, Kazutoshi Takahashi
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Abstract

Metal nanoparticles films were prepared by a gas deposition technique couple with the nanosecond pulsed Nd:YAG laser ablation of two kinds of metal targets. Two generated nanoparticles were insitu mixed in the near space of the targets in the generation chamber and transported by a helium carrier gas to the deposition chamber and deposited on a substrate to form electric devices such as a resistor, a capacitor, wiring, etc., composed of nanoparticles composites. The electrical resistivity and capacity of the devices were measured. The relationship between the experimental conditions such as ambient pressure and laser fluences and the electrical properties of each device were analyzed. A heater was produced as an example of the application of a resistor.
纳米颗粒直接喷涂制备电子器件的特性
采用气相沉积技术,结合纳秒脉冲Nd:YAG激光烧蚀两种金属靶材,制备了金属纳米颗粒薄膜。生成的两种纳米粒子在生成室的靶材附近空间原位混合,由氦气载气输送到沉积室,沉积在衬底上,形成由纳米粒子复合材料组成的电阻器、电容器、布线等电器件。测量了器件的电阻率和容量。分析了环境压力、激光影响等实验条件与各器件电性能的关系。制作了一种加热器作为电阻器应用的一个例子。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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