System optimization for energy measurements of EUV radiation pulses

Abstract

The paper presents a detection system for energy measurement of extreme ultraviolet radiation (EUV). The system consists of a calibrated silicon photodiode and a single multilayer mirror. It can be used for energy measurements of radiation pulses at 13.5 plusmn 0.5 nm wavelength range (FWHM = 7.3%). A construction of the system was optimized for operation with a laser-plasma source with gas puff target. The system provides energy measurements with uncertainty of 7.2%. Influence of particular system elements on uncertainty of the energy measurement.