Reliability modeling and optimization of MEMS elements in various devices using multi-scale concepts

Abstract

Diverse Computational methods have brought powerful techniques to calculate reliability by multi scale modeling supported by experimental and theoretical methods. These approaches play an important role in Micro Electro Mechanical Systems (MEMS) technology where the analysis is based on abstraction level theories and no comprehensive explanation of nano scale phenomenon are proposed. It is proposed that High Performance Computing (HPC) if used with multi scale optimization library then the reliability calculation can be accelerated and also research in reliability of MEMS. In this work we have developed library where we can select the various physics at different level and then calculated reliability for better accuracy. In the proposed work, Modeling and Computation is performed using MATLAB distributed computing toolbox and Sugar MEMS simulation library. It is an extension to SUGAR package for MEMS.