Poly I2L - A high-speed linear compatible structure

Abstract

THE RELATIVELY SLOW SWITCHING speed of 12L fabricated using standard processes for linear integrated circuits limits opportunities for realizing complex, high quality, analog and digital functions on a single monolithic chip. This paper will present a new approach to increase significantly 12L speed ( < l o ns @ 100 pW/gatc), while retaining isolated 15-30 V NPN transistors on 5 G! em epitaxy, without increasing the complexity of the standard linear integrated circuit process.