Bake plate control using a robust multiplexed model predictive control (RMMPC)

Abstract

This paper proposes a robust multiplexed model predictive control (MMPC) for a bake plate control system. The bake plate is a multi-inputs multi-outputs (MIMO) system which is required to have uniform temperature. In bake plate sytem, the controller must be able to reduce the disturbances caused when placing a cold wafer inside. Results show that the proposed robust MMPC can outperform in attenuating disturbance compare with the MMPC and the standard MPC.