Multiple-wavelength MBE-regrown vertical-cavity laser arrays integrated with refractive microlenses for optical interconnections

Abstract

An array of 7 multiple-wavelength MBE-regrown InGaAs QW VCSELs with 15 nm span and 30 /spl mu/m pitch is monolithically integrated with a refractive GaAs microlens on the back surface. The lens collimates individual beams to a divergence half angle <1.5/spl deg/ and separates them by /spl sim/5.