Small delay defect diagnosis through failure observation ordering

B. Arslan
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Abstract

Rapidly increasing the yield for new process generations is crucial in achieving aggressive time-to-market requirements in semiconductor industry. As process scaling continues, subtle defects, primarily small delay defects that alter the timing of the circuits, are becoming increasingly common. An accurate diagnosis of small delay defects is essential in the identification of the cause of the defects and in the subsequent yield improvement. However, small and variable magnitude of small delay defects when coupled with the variable timing margins of the chips due to the process variation imposes inordinate challenges in small delay defect diagnosis. An approach for accurate small delay defect diagnosis that effectively prunes the candidate fault list based on the expected ordering of failure observation on outputs is proposed in this work.
通过故障观察排序进行小延迟缺陷诊断
快速提高新工艺一代的产量对于实现半导体行业积极的上市时间要求至关重要。随着工艺规模的不断扩大,细微的缺陷,主要是改变电路时序的小延迟缺陷,变得越来越普遍。准确诊断小延迟缺陷对于确定缺陷的原因和随后的良率提高至关重要。然而,由于工艺变化导致的芯片时间裕度的变化,加之小延迟缺陷的小而可变的量级,给小延迟缺陷的诊断带来了极大的挑战。本文提出了一种基于故障观测输出的期望排序,有效地对候选故障列表进行小延迟精确诊断的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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