Simulation Analysis of High Frequency and High Pressure Piezoelectric Micro-Pump

Abstract

In this paper, a piezoelectric micro-pump with integrated valve based on synthetic jet structure is proposed. The piezoelectric micro-pump possesses a size of about 16mm*16mm*3mm, which works at the first-order resonant frequency of 11649Hz. With the rectangular wave driving signal has the amplitude of 24V, the average output flow of the piezoelectric micro-pump is about 139.5 mL /min. The maximum output pressure can reach more than 30 kPa. Compared with the existing piezoelectric pump, it has the advantages of high-pressure retention and small size, indicating a potential application in wearable device such as smart pressure watch.