The Use of 3-D Printing in Teaching MEMS Device Design and Fabrication

Abstract

This paper presents an overview of how three-dimensional (3-D) printing can be used as an educational tool in the area of Micro-Electromechanical Systems (MEMS) and microfabrication. Microfabrication processes used to realize MEMS devices typically take place in a cleanroom. The use of 3-D printing to emulate the process of MEMS device layout, fabrication and design provides a cost-effective alternative method to teaching MEMS fabrication and modeling without the need to access a cleanroom.