A new coplanar waveguide vector network analyzer for on-wafer measurements

Abstract

A new coplanar-waveguide network analyzer system that is specifically designed for on-wafer characterization of millimeter-wave devices and circuits is presented. The analyzer is made entirely in coplanar-waveguide to achieve large bandwidths and eliminate all discontinuities between the test set and wafer except the probe tip contacts. The analyzer is made by spacing detector diodes logarithmically along the coplanar-waveguide probe-tip to sample the signal, and it uses six-port theory to calculate complex scattering parameters. A 15.7-GHz prototype analyzer has been demonstrated.<>