Nonlinear Model Based Control of MEMS Micro-Mirror

Abstract

This paper presents a nonlinear model based control scheme for angular deflection of electromagnetically actuated MEMS micro-mirror. As the electromagnetic micro-mirror is involved with both underdamped characteristic and hysteresis phenomenon, the control of angular deflection to derive fast and accurate positioning is a challenge. In this paper, a nonlinear dynamic model is proposed to depict the characteristic of the electromagnetic micro-mirror. Then, based on the nonlinear dynamic model, a nonlinear model based control strategy is developed for the angle control of the micro-mirror.