LED integrated miniaturized polymer MEMS display

Abstract

This study presents the process development and first experimental results of LED integrated polymer microelectromechanical systems (MEMS) for two-dimensional displays. Proposed integrated system is very cheap due to the fabrication simplicity and the choice of polymer material as the structural layer, and it is a strong candidate to show similar performance when compared with the existing flat panel displays. A process technology that enables the integration of the LED dies and the PCB-based MEMS structure is presented. The very first version of the MEMS structure is actuated by consuming 11.5 mW and resulting displacement is measured to be 9 mm. Along with the LED die size of 250 mum times 250 mum, 36 pixels of resolution can be achieved.