Optical and membrane modelling in a MEMS hyperspectral imaging system

2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601) Pub Date : 2002-12-11 DOI:10.1109/COMMAD.2002.1237318

J. Wehner, M. Martyniuk, J. Antoszewski, C. Musca, J. Dell, L. Faraone

引用次数: 2

Abstract

Hyperspectral imaging using micro-electro-mechanical systems (MEMS) is investigated. A Fabry-Perot cavity is created using a silicon nitride membrane suspended over a variable length air gap, to support a distributed Bragg reflector. Models of membrane behaviour and reflector optical performance are given.

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MEMS高光谱成像系统的光学和膜建模

研究了利用微机电系统(MEMS)进行高光谱成像的方法。法布里-珀罗腔采用悬浮在可变长度气隙上的氮化硅膜，以支持分布式布拉格反射器。给出了薄膜性能和反射器光学性能的模型。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)

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