Combined measurement of surface potential and zeta potential at insulator/electrolyte interfaces

L. Bousse, S. Mostarshed, D. Hafeman
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引用次数: 2

Abstract

Simultaneous measurements of relative surface potential and zeta potential, as monitored by streaming potential measurement, were made at the interface between Si/sub 3/N/sub 4/ (on a semiconductor substrate) and aqueous electrolytes of varied pH. The light-addressable-potentiometric-sensor (LAPS) technique was used to make the simultaneous measurements. The results indicate the zero zeta potential occurred at an electrolyte pH of 3.1. Upon changing pH, approximately 10% of the surface potential change also appeared as a change in zeta potential.<>
绝缘体/电解质界面表面电位和ζ电位的组合测量
在Si/sub - 3/N/sub - 4/(半导体衬底上)与不同ph的水溶液的界面处,通过流电位测量同时测量相对表面电位和zeta电位,采用光寻址电位传感器(LAPS)技术进行同时测量。结果表明,当电解液pH为3.1时,zeta电位为零。当pH值改变时,大约10%的表面电位变化也表现为zeta电位的变化。
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