Strategies to Identify Physical Origin of Contrast in EBIRCH

Abstract

The Electron Beam Induced Resistance Change (EBIRCH) technique is becoming more popular for localization of defects in Electrical Failure Analysis (EFA). Whilst EBIRCH is clear and straightforward in the procedure that must be followed for localization, it does not provide a direct understanding of the fundamental origin of its signal. This contribution addresses this significant shortfall in the technique, proposing a few basic experimental steps to be added to the technique in continuation of localization, with the principal aim of interrogating the physical origin of signal.