R. Salem, Vic Vadi, A. Pinto, P. Pathak, Ya-Chieh Lai, Frank Gennari, P. Hurat
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引用次数: 1
Abstract
Integrated Circuit manufacturing complexities have resulted in decreased defect limited and parametric limited yields. In leading-edge technologies, silicon learnings are very limited, especially in the early phase of the technology development. In this work, a novel approach of pre-tapeout and pre-mask making verification is introduced using a design diffing methodology to determine a population of new “foundry-unknown” patterns that were never introduced in previous products, scoring them based on their potential manufacturing risk, and identifying suspected yield detractor patterns.