Bond failures on hybrid-WSI substrates

C. Habiger
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引用次数: 3

Abstract

Modern hybrid wafer scale integration (HWSI) devices increasingly employ flip-chip bonding. Thermal cycling tests do not model the true operating conditions of HWSI devices, as the differences in operating temperatures of chips and substrate are neglected. These temperature differences resemble the most important thermal bond failure mechanism. An approach to the modeling of true operating conditions is presented, and its impact on the reliability of flip-chip bonds in silicon-on-silicon assemblies is assessed.<>
混合wsi衬底上的键合失效
现代混合晶圆规模集成(HWSI)器件越来越多地采用倒装键合。热循环测试不能模拟HWSI器件的真实工作条件,因为芯片和衬底的工作温度差异被忽略了。这些温差类似于最重要的热粘结失效机制。提出了一种模拟真实工作条件的方法,并评估了其对硅对硅组件中倒装键可靠性的影响
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