Fractal study for describing surface morphology from atomic forge microscopy images

C. Flueraru, S. Năstase, Ş. Iovan
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引用次数: 5

Abstract

Roughness profiles of various polysilicon surface were measured by atomic force microscopy. These profiles are analysed using fractal theory to illustrate the advantage of treating surface morphology from the fractal point of view.
描述原子锻造显微图像表面形貌的分形研究
用原子力显微镜测量了不同多晶硅表面的粗糙度分布。用分形理论对这些剖面进行了分析,以说明从分形的角度处理表面形貌的优点。
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