H. Ishikawa, M. Takamoto, K. Shimizu, H. Monji, G. Matsui
{"title":"Development of a new ultrasonic liquid flowmeter for very low flow rate applicable to a thin pipe","authors":"H. Ishikawa, M. Takamoto, K. Shimizu, H. Monji, G. Matsui","doi":"10.1109/ISSM.2000.993693","DOIUrl":null,"url":null,"abstract":"A new ultrasonic liquid flowmeter has been developed to measure very low flow rate. This flow meter consists of small disk ultrasonic transducers and measuring pipe whose diameter is less than 1 mm. The measuring pipe passed through the ultrasonic transducer two times making the loop feature. A very low flow rate less than 1ml/min can be measured accurately and stably.","PeriodicalId":104122,"journal":{"name":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2000.993693","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
A new ultrasonic liquid flowmeter has been developed to measure very low flow rate. This flow meter consists of small disk ultrasonic transducers and measuring pipe whose diameter is less than 1 mm. The measuring pipe passed through the ultrasonic transducer two times making the loop feature. A very low flow rate less than 1ml/min can be measured accurately and stably.