Materials challenges for wafer-level flip chip packaging

B. Ma, Q. Tong, E. Zhan, Sunhee Hong, A. Savoca
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引用次数: 3

Abstract

Flip chip as the smallest packaging design has been used in more and more electronic applications. Flip chip underfill is an essential component for the reliability of the package. Currently, the dispensing process is done at each individual chip level after interconnects have been made. The device then has to go through a separate curing process to harden the underfill material. This process is cumbersome and is one of the cost drivers of flip chip application. In wafer level flip chip packaging, the dispensing is made over the whole wafer in one step. After dicing, the reflow and the curing of underfill will be accomplished also in one step. The saving on process cost will be significant. The new process brings new challenges to underfill development. In addition to performing the reinforcement role as an underfill, these new materials have to act as a fluxing agent for solder reflow. They also have to have good room temperature stability after being dispensed onto wafer, handled at ambient environment, and before being cured in the reflow oven. The author will discuss parameters that determine the material performance at each processing step as well as the material development effort undergoing in a wafer-level underfill development program, which is sponsored by the Advanced Technology Program (ATP).
晶圆级倒装芯片封装的材料挑战
倒装芯片作为最小的封装设计,在越来越多的电子应用中得到了应用。倒装芯片底填料是封装可靠性的重要组成部分。目前,分配过程是在互连完成后在每个单独的芯片级别完成的。然后,该装置必须经过一个单独的固化过程来硬化下填料。这个过程很麻烦,是倒装芯片应用的成本驱动因素之一。在晶圆级倒装芯片封装中,点胶是在整个晶圆上一步完成的。切丁后的回流和底填料的养护也是一步到位。过程成本的节省将是显著的。新工艺给深部充填开发带来了新的挑战。这些新材料除了起到补强的作用外,还可以作为焊料回流的助熔剂。它们还必须具有良好的室温稳定性,在被分配到硅片上后,在环境中处理,然后在回流炉中固化。作者将讨论在每个加工步骤中决定材料性能的参数,以及在由先进技术计划(ATP)赞助的晶圆级底填开发计划中进行的材料开发工作。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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