Design of a parallel kinematic MEMS XY nanopositioner

2015 IEEE International Conference on Robotics and Biomimetics (ROBIO) Pub Date : 2015-12-01 DOI:10.1109/ROBIO.2015.7419062

Hongliang Shi, Yongsik Kim, Y. She

{"title":"Design of a parallel kinematic MEMS XY nanopositioner","authors":"Hongliang Shi, Yongsik Kim, Y. She","doi":"10.1109/ROBIO.2015.7419062","DOIUrl":null,"url":null,"abstract":"The purpose of this research is to design a novel parallel kinematic micro-electro-mechanical systems (MEMS) XY nanopositioner. It is challenging to design a MEMS XY positioner because of the limitations of fabrication, material property and actuation. The XY nanopositioner proposed in this manuscript is featured for decoupled motions, large stroke, compact size and large out-of-plane stiffness. This positioner includes three parts: thermal actuator, displacement amplifier and guide mechanism. The thermal actuator is applied to create a large electrothermal force for the in-plane motion. The lever based displacement amplifier is designed to increase the in-plane stroke. The symmetrical parallel guide mechanism is used to decouple the motions in the x and y directions while increasing the out-of-plane stiffness. Based on the Screw Theory, we derive an analytical model for the actuation and control of the stage. Furthermore, a Finite Element (FE) model is proposed to analyze the analytical model. By means of MEMS fabrication, the footprint of the XY nanopositioner is only 5 mm × 5 mm. However, the nanopositioner is capable of reaching a stroke of 83 μm × 83 μm. Compared with other designs, this parallel XY positioner has a large work space with a compact size.","PeriodicalId":325536,"journal":{"name":"2015 IEEE International Conference on Robotics and Biomimetics (ROBIO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE International Conference on Robotics and Biomimetics (ROBIO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ROBIO.2015.7419062","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

Abstract

The purpose of this research is to design a novel parallel kinematic micro-electro-mechanical systems (MEMS) XY nanopositioner. It is challenging to design a MEMS XY positioner because of the limitations of fabrication, material property and actuation. The XY nanopositioner proposed in this manuscript is featured for decoupled motions, large stroke, compact size and large out-of-plane stiffness. This positioner includes three parts: thermal actuator, displacement amplifier and guide mechanism. The thermal actuator is applied to create a large electrothermal force for the in-plane motion. The lever based displacement amplifier is designed to increase the in-plane stroke. The symmetrical parallel guide mechanism is used to decouple the motions in the x and y directions while increasing the out-of-plane stiffness. Based on the Screw Theory, we derive an analytical model for the actuation and control of the stage. Furthermore, a Finite Element (FE) model is proposed to analyze the analytical model. By means of MEMS fabrication, the footprint of the XY nanopositioner is only 5 mm × 5 mm. However, the nanopositioner is capable of reaching a stroke of 83 μm × 83 μm. Compared with other designs, this parallel XY positioner has a large work space with a compact size.

查看原文本刊更多论文

并联运动MEMS XY纳米对位器的设计

本研究的目的是设计一种新型的并联微机电系统(MEMS) XY纳米对位器。由于制造工艺、材料性能和驱动的限制，MEMS XY定位器的设计具有一定的挑战性。本文提出的XY纳米对位剂具有运动解耦、行程大、尺寸紧凑、面外刚度大等特点。该定位器由热致动器、位移放大器和导向机构三部分组成。应用热致动器为平面内运动产生较大的电热力。设计了基于杠杆的位移放大器，以增加平面行程。采用对称并联导轨机构对x、y方向运动进行解耦，同时增加了面外刚度。在螺旋理论的基础上，推导出了平台驱动与控制的解析模型。此外，还提出了一种有限元模型来对解析模型进行分析。通过MEMS制造，XY纳米对位器的占地面积仅为5mm × 5mm。然而，纳米对立剂能够达到83 μm × 83 μm的行程。与其他设计相比，该并联XY定位机具有体积小，工作空间大的特点。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

2015 IEEE International Conference on Robotics and Biomimetics (ROBIO)

自引率

0.00%

发文量