ESD sensitivity study of various diode protection circuits implemented in a production 1 /spl mu/m GaAs HBT technology

F. Yamada, A. Oki, E. Kaneshiro, M. Lammert, A. Gutierrez-Aitken, J. Hyde
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引用次数: 9

Abstract

Advanced GaAs Heterojunction Bipolar Transistors (HBTs) featuring smaller junction areas have an increased susceptibility to damage from Electrostatic Discharge (ESD) events and this is a topic of concern. In this paper, we examined the ESD sensitivity of various on-chip ESD-protection networks designed using base-collector (BC) junction diodes and Schottky diodes from a production 1 /spl mu/m GaAs/AIGaAs HBT process. The purpose of this work was to measure and evaluate the ESD sensitivity of various protection networks and determine their effectiveness as protection devices.
1 /spl mu/m GaAs HBT生产技术中实现的各种二极管保护电路的ESD灵敏度研究
结面积较小的先进砷化镓异质结双极晶体管(hbt)对静电放电(ESD)事件的易感性增加,这是一个值得关注的话题。在本文中,我们研究了采用基极集电极(BC)结二极管和肖特基二极管设计的各种片上ESD保护网络的ESD灵敏度,这些网络来自1 /spl mu/m GaAs/AIGaAs HBT生产工艺。本工作的目的是测量和评估各种保护网的ESD灵敏度,并确定其作为保护装置的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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