P. Coleman, C. P. Burrows, A. Knights, B. Sealy, R. Gwilliam
{"title":"Construction and performance of a bench-top mapping positron alpha tool","authors":"P. Coleman, C. P. Burrows, A. Knights, B. Sealy, R. Gwilliam","doi":"10.1109/IIT.2002.1258010","DOIUrl":null,"url":null,"abstract":"A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin film interrogation.","PeriodicalId":305062,"journal":{"name":"Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IIT.2002.1258010","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin film interrogation.