Evaluation of a novel antimony source delivered as vapor from an implanter gas box

Abstract

A novel antimony compound has been developed for the ion implantation process. The dominant and current compound used in many applications is antimony trioxide, a solid material that must be vaporized at high temperatures within the ion source. This paper discusses the technique to be used to evaluate the volatile solid compound SbCH3Br2 (dibromomethyl-stibine) in comparison to the solid Sb2O3 (antimony trioxide). The delivery changes and requirements, and the methods used to compare the performance of the compounds will be discussed.