Sensitivity enhancement by surface texturing of Ag-doped BaTiO3-CuO thin film for CO2 gas sensor

Abstract

Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO3-CuO on Ag-doped BaTiO3-CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <;100> substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped BaTiO3-CuO mixed oxide are fabricated on top of the film using lithography process. Sensing characteristics for different CO2 concentration are obtained for different operating temperatures. Surface textured sensor device shows enhanced sensitivity over thin film sensor.