Fabrication of a microwave MEMS switch

Abstract

We are developing a fabrication process for a microelectro-mechanical system (MEMS) microwave switch. Our aim is to make a switch that operates from dc to 40 GHz with low insertion loss and high isolation. The, electrostatically activated, switch is based on a coplanar waveguide design with a cantilever or bridge mounted contact to open and close the switch. The fabrication process is not reliable yet, but we have made a working switch with an on state insertion loss less than 0.3 dB and an off state isolation of 45 dB at 4 GHz. Material properties and mechanical design are important in the operation of the switch.