Stress-insensitive diffused resistor network for a high accuracy monolithic D/A converter

S. Komatsu, K. Suzuki, N. Iida, T. Aoki, T. Ito, H. Sawazaki
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引用次数: 10

Abstract

The stress-insensitive configuration of a Ladder network for a high accuracy monolithic D/A converter is described. To avoid the piezoresistance effect, a stress-insensitive crystal axis is found from the result of the new stress analysis using simple resistors as a strain-sensitive device, which is shifted by 45° from a conventional axis on a surface of
高精度单片D/ a转换器的应力不敏感扩散电阻网络
描述了用于高精度单片D/ a转换器的梯形网络的应力不敏感结构。为了避免压阻效应,利用简单电阻器作为应变敏感器件,从新的应力分析结果中发现了应力不敏感的晶体轴,该轴与表面的传统轴位移45°
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