Growth and Epitaxy of Materials for Multilayer X-ray Optics

J. Slaughter, P. Kearney, J. A. Ruffner, C. Falco
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Abstract

New material pairs are needed to provide useful mirrors at wavelengths where currently none exist, and to improve on performance at wavelengths where there are existing mirrors. In this paper we discuss our studies of selected new materials. Our studies take a surface analysis approach toward characterizing reactions at interfaces, the sharpness of interfaces, and the effect of the thin film growth mode on roughness. The studies were carried out in molecular beam epitaxy systems for two reasons: to study epitaxial growth of promising materials as a step toward single-crystal multilayer mirrors, and to exploit the powerful analytical tools available for surface analysis in a UHV environment. Growth of Be-, and B-based materials pairs have been studied with a wide variety of techniques including Auger, XPS, RHEED, LEED, and STM with the goal of determining interface structure, overlayer morphology, and crystal structure.
多层x射线光学材料的生长与外延
需要新的材料对在目前没有的波长上提供有用的反射镜,并在已有反射镜的波长上提高性能。本文讨论了新材料的选材研究。我们的研究采用表面分析方法来表征界面上的反应,界面的锐度,以及薄膜生长方式对粗糙度的影响。这些研究是在分子束外延系统中进行的,有两个原因:研究有前途的材料的外延生长,作为迈向单晶多层镜的一步,并利用强大的分析工具在特高压环境下进行表面分析。Be-和b基材料对的生长已经用各种各样的技术进行了研究,包括俄格、XPS、RHEED、LEED和STM,目的是确定界面结构、覆盖层形态和晶体结构。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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