Advanced Color Filter Isolation Technology for Sub-Micron Pixel of CMOS Image Sensor

Hojin Bak, Horyeong Lee, Won‐Jin Kim, Inho Choi, H. Kim, Dongha Kim, Hanseung Lee, Sukman Han, Kyoung-In Lee, Young-Rak Do, Minsu Cho, M. Baek, K. Kim, Wonje Park, Seong-Hun Kang, S. Hong, Hoon-Sang Oh, Changrock Song
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引用次数: 1

Abstract

In this work, novel color filter isolation technology, which adopts air, the lowest refractive index material on the earth, as a major component of an optical grid structure for submicron pixels of a CMOS image sensor, is presented. Metal in a conventional metal grid structure, which has been widely used for mobile CMOS image sensors, was replaced by the air. The image quality improvement was verified through the enhanced optical performance of the air-grid-assisted pixels.
用于CMOS图像传感器亚微米像素的先进彩色滤波器隔离技术
本文提出了一种新的彩色滤光片隔离技术,该技术采用空气这种地球上折射率最低的材料作为CMOS图像传感器亚微米像素的光栅结构的主要组成部分。传统的金属栅格结构已被广泛应用于移动CMOS图像传感器,取而代之的是空气栅格结构。通过提高空气网格辅助像素的光学性能,验证了图像质量的改善。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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