FABRICATION OF p-NiO/n-ZnO:Ga HETEROSTRUCTURES FOR A RECTIFIER DIODE AND A UV PHOTODETECTOR VIA RF MAGNETRON SPUTTERING AND SPRAY PYROLYSIS SYNTHESIS

L. Ghimpu, Victor Suman, D. Rusnac, T. Potlog
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Abstract

In this paper, a p–n thin film NiO/ZnO heterojunction for a rectifier diode and a UV photodetector is prepared and characterized. Nickel oxide (NiO) and gallium-doped zinc oxide (ZnO:Ga) thin films are grown by RF magnetron sputtering and spray pyrolysis techniques, respectively. The crystal structure of the thin films is studied by the X-ray diffraction (XRD) method. The transmittance and reflectance are studied by UV–VIS spectroscopy. The p–n electrical parameters are estimated from current–voltage characteristics. The effects of duration of thermal annealing at 450 o C on the characteristics of the NiO/ZnO:Ga device are evaluated. The non-annealed diode shows the best rectification coefficient of 10 5 at ±1 V. The p–n photodetection capability is studied under UV illumination. At a reverse bias of –3 V under 365-nm UV illumination, the device shows a current intensity of ~6.2 × 10 12 A. The observed increase in the reverse current intensity by about two orders of magnitude under a UV lamp with a spectral irradiance of 10 W m 2 m 1 indicates a promising application in UV light detection.
用射频磁控溅射和喷雾热解合成制备用于整流二极管和紫外光电探测器的p-NiO/n-ZnO:Ga异质结构
本文制备了一种用于整流二极管和紫外光电探测器的p-n薄膜NiO/ZnO异质结,并对其进行了表征。采用射频磁控溅射和喷雾热解技术分别制备了氧化镍(NiO)和掺镓氧化锌(ZnO:Ga)薄膜。用x射线衍射(XRD)方法研究了薄膜的晶体结构。用紫外可见光谱法研究了其透光率和反射率。p-n电学参数由电流-电压特性估计。研究了450℃热处理时间对NiO/ZnO:Ga器件性能的影响。非退火二极管在±1 V时的最佳整流系数为10.5。研究了紫外光照射下的p-n光探测能力。在365nm紫外光照射下,在-3 V的反向偏置下,器件显示出~6.2 × 10 × 12 a的电流强度。在光谱辐照度为10 W m + 2m + 1的紫外灯下,观察到逆流强度增加了约两个数量级,表明在紫外光检测中有很好的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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