Interaction of Surface Roughness and Copper Ball Adhesion Using Shearing Simulation

V. Retnasamy, Z. Sauli, A. Shapri, S. Taniselass, R. Vairavan, N. Ramli
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引用次数: 12

Abstract

Wire bonding is one of the commanding interconnection techniques used at the back end of line due to its vast adaptability to the advancing trend of circuit designs. Wire bond shear test method is utilized to examine adhesion strength of the bonded wires. In this paper, the stress response of copper ball bond during wire bond shear test is investigated The influences of three types of bond pad surface; flat surface, hemisphere surface and sharp groove surface on the stress response of copper ball bond during wire bond shear test were evaluated. The simulation was done using Ansys version 11.The simulation results showed the bond pad surface had a significant influence on the stress response of copper ball bond. At the shear ram displacement distance of 35μm, the peak stress responses for all three bond pad surface were obtained.
基于剪切模拟的表面粗糙度与铜球粘附的相互作用
由于线键合技术对电路设计的发展趋势具有很强的适应性,因此成为线路后端最常用的互连技术之一。采用线材粘结剪切试验方法,对粘结线材的粘结强度进行检验。本文研究了铜球键在钢丝键合剪切试验中的应力响应,研究了三种键合垫面对铜球键合的影响;对铜球键在线键剪切试验中的应力响应进行了平面、半球面和尖槽面评价。采用Ansys 11进行仿真。仿真结果表明,键垫表面对铜球键的应力响应有显著影响。在剪切柱塞位移距离为35μm时,得到了3种粘结垫表面的峰值应力响应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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