HgCdTe heterostructures grown by MBE on Si(310) substrates: structural and electrophysical properties

M. Yakushev, A. Babenko, V. Varavin, V. Vasil’ev, L. V. Mironova, D. N. Pridachin, V. G. Remesnik, I. V. Sabrinina, Yu. G. Sidorov, A. Suslyakov
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引用次数: 1

Abstract

Molecular beam epitaxy has been used for the growth of Hg1-xCdxTe layers (x = 0.30 - 0.34) on Si(310) substrates. The grown structures were characterized by Hall measurements for carrier density and mobility. The densities of stacking faults, threading dislocations, antiphase boundaries and macroscopic V-defects were determined by selective chemical etching. The 128 x 128 photodiode array with wavelength cut-off λ1/2(77K) = 4.07 μm was fabricated with good photoelectric parameters.
MBE在Si(310)衬底上生长HgCdTe异质结构:结构和电物理性质
分子束外延被用于在Si(310)衬底上生长Hg1-xCdxTe层(x = 0.30 - 0.34)。用霍尔测量法测定了载流子密度和迁移率。采用选择性化学腐蚀法测定了层错、螺纹位错、反相边界和宏观v型缺陷的密度。制备了波长截止波长为λ1/2(77K) = 4.07 μm的128 × 128光电二极管阵列,具有良好的光电参数。
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