Preparation and characterization of LiNbO3 thin films by the aqueous citric gel method

Abstract

LiNbO3 thin films with well-developed grains were fabricated by spin-coating on SiO2(111) substrates. Annealing in static air and oxygen atmosphere was performed at 400° C 500° C 600° C for 3 h. The films obtained were characterized by thin film XRD, scanning electron microscopy and elemental analysis. Electrical characterizations of the films pointed to ferroelectricity via hysteresis loop. The influence of oxygen atmosphere on crystallization, morphology and properties of LiNbO3 thin films is discussed.