Switching capacity of MEMS tilting micromirrors

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318864

D. Marom

引用次数: 1

Abstract

The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.

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MEMS倾斜微镜的开关容量

仅根据微镜的尺寸和角度倾斜范围，计算了微镜的理论开关容量。所开发的指标可用于比较不同的镜子设计及其性能潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2012 International Conference on Optical MEMS and Nanophotonics

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