Electronic system for control of a thermally actuated alignment device

Ruimin Yang, J. van Schieveen, S. Nihtianov, J. Spronck
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引用次数: 3

Abstract

This article presents the design of an electronic system that is used to control a thermally actuated alignment device. This device is ideal for aligning critical parts in complex, high-precision systems, like, for example, optical elements or the electrodes of capacitive sensors. Accurate temperature control of the thermal elements improves the performance of the alignment in terms of positioning accuracy and operating speed. Furthermore, the article presents the realized test setup and the initial measurement results. The measurement results show the benefits of the new controller.
控制热致动校直装置的电子系统
本文介绍了一种用于控制热致准直装置的电子系统的设计。该设备非常适合对准复杂、高精度系统中的关键部件,例如光学元件或电容式传感器的电极。热元件的精确温度控制提高了定位精度和操作速度方面的对准性能。文中还介绍了实现的试验装置和初步测量结果。测试结果表明了该控制器的优越性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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