Joseph de Saxcé, Philippe Roux-Lévy, Siah Chun Fei, Jianxiong Wang, Tay Beng Kang, Philippe Coque, D. Baillargeat
{"title":"Millimeter-wave CNT Based Resonant Cavity","authors":"Joseph de Saxcé, Philippe Roux-Lévy, Siah Chun Fei, Jianxiong Wang, Tay Beng Kang, Philippe Coque, D. Baillargeat","doi":"10.1109/IMWS-AMP.2019.8880083","DOIUrl":null,"url":null,"abstract":"A 50 GHz carbon nanotube based rectangular resonant cavity is designed, allowing to experimentally obtain the value of the RF conductivity of high-density CNT forests. It also validates a CMOS compatible fabrication process robust to current leakage. A CNT equivalent bulk model is used for 3D electromagnetic simulations and parametric analysis. A new transfer method of CNT forests is considered for the fabrication of the rectangular cavity resonator.","PeriodicalId":109953,"journal":{"name":"2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMWS-AMP.2019.8880083","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A 50 GHz carbon nanotube based rectangular resonant cavity is designed, allowing to experimentally obtain the value of the RF conductivity of high-density CNT forests. It also validates a CMOS compatible fabrication process robust to current leakage. A CNT equivalent bulk model is used for 3D electromagnetic simulations and parametric analysis. A new transfer method of CNT forests is considered for the fabrication of the rectangular cavity resonator.