Advances in diamond surface channel FET technology with focus on large signal properties

M. Kubovi, A. Aleksov, A. Denisenko, E. Kohn
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引用次数: 4

Abstract

Field effect transistors based on a hydrogen induced p-type surface channel (surface channel FETs) have shown steady progress in the past. Devices with sub-/spl mu/m gatelength have been fabricated and cut-off frequencies up to the mm-wave range could be extracted. However, large signal and power performance could only be reported recently. This is due to severe stability and degradation problems. These phenomena are largely related to the highly polar H-terminated diamond surface, although details are still in discussion. This contribution describes these instabilities and the recent progress obtained. To some extent this may also shine some light onto the nature of instabilities observed in GaN based devices.
金刚石表面沟道场效应管技术的进展,重点是大信号特性
基于氢诱导p型表面沟道的场效应晶体管(表面沟道场效应管)在过去取得了稳定的进展。制备了亚/spl μ m /m栅极长度器件,可提取毫米波范围内的截止频率。然而,大信号和功率性能直到最近才得以报道。这是由于严重的稳定性和退化问题。这些现象在很大程度上与高极性的h端金刚石表面有关,尽管细节仍在讨论中。这篇文章描述了这些不稳定性和最近取得的进展。在某种程度上,这也可能对氮化镓基器件中观察到的不稳定性的性质有所启发。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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