New functional semiconductor devices fabricated using bio nano process

Abstract

In this study, we propose a nano-system utilizing bio supra molecules as bio template. Bio supra molecules has many fascinating features such as size uniformity and self-assembling ability, which cannot be observed in conventional inorganic materials. We established the technique to place above-mentioned material accurately from one to three dimensions on the semiconductor substrate. In this work, we introduce several examples of application to electron device, such as floating gate memory, resistive memory, thin film transistor, MEMS sensor, solar cell, meta-materials.