A Dynamic Sampling Algorithm Based on Cosrisk Assessment Model in Semiconductor Manufacturing

Abstract

Traditional fixed sampling methods are becoming more difficult to meet the requirements of today's advanced semiconductor manufacturing. In this paper, we propose a dynamic sampling algorithm based on a cost-risk assessment model. According to the result of application, the algorithm not only effectively reduces the sample ratio and the cycle time, but also reduces the catch excursion of the required number of sampling lots and interval time. It can improve the economic efficiency of measurement per unit time and further improve the production capacity of the enterprise.