Sensitivity analysis of MEMS switch contact bouncing using dual-pulse actuation waveforms

Abstract

A simulation on the dynamics of RF MEMS switch actuated using different tailored actuation voltage waveforms is presented. From the analysis, the contact velocity of the switch membrane is evaluated and compared. In order to eliminate bouncing, the approaching speed of the membrane should ideally be zero when contact is made, else the momentum of the high speed impact will bounce the membrane back and causing electrical discontinuities at the output signal. The effect of switch parameter variation on the bouncing is then studied by varying the parameter of the actuation voltages. Simulation and experimental results are then presented to corroborate the analytical findings.