Investigation of atomic processes of multiple charged ions for their application to the EUV source

Abstract

We investigate atomic structure and atomic processes of Sn and heavier elements for present and future extension of EUV source. We investigate experimental and theoretical spectrum to identify the average wavelength, width and strength of combined 4d-4f and 4p-4d transition arrays from which intense EUV emission is obtained. We investigate the spectrum taking the effect configuration interaction (CI), as well as the effect of emission from multiply and inner-shell excited states. We will discuss data driven approaches, with that fast and accurate methods to predict spectral property of the plasma is explored.