Comb-drive variable capacitor design features for vibration energy generator

Abstract

Comb-drive variable capacitor construction parameters influence on maximal-to-minimal capacitance is studied. Comb-drive variable capacitor construction with electrode overlap area change at different comb width and electrode thickness is modeled. The increase of maximal-to-minimal capacitance ratio has been observed when comb width was decreased and electrode thickness was increased without substantial modification of the variable capacitor dimension. The results obtained allows to enhance the efficiency of vibration energy generator by increasing their output power.