Characteristics of Love Wave Device with Ni Pillars on Zno/R-Sapphire Structure

2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA) Pub Date : 2019-11-01 DOI:10.1109/SPAWDA48812.2019.9019271

Xiao-qing Liu, Shu-lin Shang, Yan Wang, Suzhen Liang

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Abstract

Phononic crystals (PnCs) have attracted considerable attention in recent years because of the ability to control and manipulate acoustic and elastic wave propagation. A Love wave device composed of Nickel pillars on (110)ZnO/R-sapphire substrate is constructed by using COMSOL Multiphysics. The characteristics of the device, including the phase velocity (vp) and the electromechanical coupling coefficient (k2), are theoretically analyzed by finite element method (FEM). The results show that the 1st mode of love waves appear at hZnO/λ=0.0625, while the point of occurrence is 0.31 at PnCs-free SAW structure. And the maximum electromechanical coupling coefficient(k2) of 3.27% is obtained by optimizing the structure of Nickel pillars, which is much higher than that of PnCs-free structure. All of the results indicate that the performances of the love wave device based on Nickel pillars/(110)ZnO/R-sapphire structure are superior to that of PnCs-free structure. And it provides a theoretical basis for designing Love wave devices with high frequency.

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Zno/ r -蓝宝石结构上Ni柱Love波器件的特性

声子晶体(Phononic crystals, PnCs)由于能够控制和操纵声波和弹性波的传播，近年来引起了广泛的关注。利用COMSOL Multiphysics在(110)ZnO/ r -蓝宝石衬底上构建了镍柱Love波器件。采用有限元法对该装置的相速度vp和机电耦合系数k2进行了理论分析。结果表明:在无pnc的SAW结构中，love波的第一模态出现在hZnO/λ=0.0625处，而出现点在0.31处。通过优化镍柱结构，获得了最大的机电耦合系数k2(3.27%)，远高于无pnc结构。结果表明，基于镍柱/(110)ZnO/ r -蓝宝石结构的love wave器件性能优于无pnc结构。为设计高频Love波器件提供了理论依据。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)

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