Calibration of step height standards in sub-micrometer range using three-dimensional reconstruction method in a scanning electron microscope

Abstract

In this paper we present a new method of calibration of step height standard (SHS) in sub-micrometer range using 3D reconstruction method based on processing of stereo-pair images, acquired by scanning electron microscope (SEM). According to the proposed method, we additionally used a silicon relief structure with approximately the same step height as SHS, and a stylus profiler. The true value of the tilt angle of the SEM specimen stage was measured using an arrangement comprising calibrated prismatic reflective member, mounted on the stage. The analysis of the sources of uncertainty of the step height measurements was carried out.